Piezoelectric Multilayer Beam Bending Actuators: Static and Dynamic Behavior and Aspects of Sensor Integration: Static and dynamic behaviour and sensor integration (Microtechnology and MEMS)

Piezoelectric

Springer Berlin Heidelberg · 2007

Gebunden

EAN=ISBN-13: 978-3-540-32641-0

ISBN-10: 3-540-32641-3