Physical Design and Mask Synthesis for Directed Self-Assembly Lithography (NanoScience and Technology)

NanoScience

von Seongbo Shim

Taschenbuch

ISBN: 978-3-030-09455-3

ISBN-10: 3-030-09455-3

Springer · April 2019

Siehe auch:
2018Gebundene AusgabePhysical Design and Mask Synthesis for Directed Self-Assembly Lithography (NanoScience and Technology)