Modeling of Chemical Vapor Deposition of Tungsten Films (Progress in Numerical Simulation for Microelectronics)

Deposition

von Chris R. Kleijn

Taschenbuch

ISBN: 978-3-0348-7743-5

ISBN-10: 3-0348-7743-9

Birkhäuser · 2013

S. auch:
1993HardcoverModeling of Chemical Vapor Deposition of Tungsten Films (Progress in Numerical Simulation for Microelectronics)