Predictive Simulation of Semiconductor Processing: Status and Challenges (Springer Series in Materials Science (72), Band 72)

Processing

von: Jarek Dabrowski · Eicke R. Weber

Gebunden

ISBN: 978-3-540-20481-7

ISBN-10: 3-540-20481-4

Springer · 2004

S. auch:
2010TaschenbuchPredictive Simulation of Semiconductor Processing: Status and Challenges (Springer Series in Materials Science, Band 72)