Sensor-based Modeling and Monitoring of Chemical Mechanical Polishing: Analysis of Experimental Sensor Data Integrating Statistical Time Series Analysis and Nonlinear Dynamics (Chaos Theory) Paradigms

Integrating

von Prahalada Rao

Taschenbuch

ISBN: 978-3-639-03564-3

ISBN-10: 3-639-03564-X

VDM Verlag Dr. Müller · 2008