Film Deposition by Plasma Techniques (Springer Series on Atomic, Optical, and Plasma Physics, Band 10)

Deposition

von Mitsuharu Konuma

Taschenbuch

ISBN-13: 978-3-642-84513-0

ISBN-10: 3-642-84513-4

Springer Berlin Heidelberg · 1992

S. auch:
1992Gebundene AusgabeFilm Deposition by Plasma Techniques (Springer Series on Atomic, Optical, and Plasma Physics)
1992HardcoverFilm Deposition by Plasma Techniques (Springer Series on Atoms and Plasmas)