Sputtering by Particle Bombardment II: Sputtering of Alloys and Compounds, Electron and Neutron Sputtering, Surface Topography (Topics in Applied Physics (52), Band 52)
von
R. Behrisch
Taschenbuch
Details (
Deutschland
)
ISBN: 978-3-662-31169-1
ISBN-10: 3-662-31169-0
Springer
· 2014
Siehe auch:
1983
Hardcover
Sputtering by Particle Bombardment II: Sputtering of Alloys and Compounds, Electron and Neutron Sputtering, Surface Topography