Bias-Temperature-Instabilities in MOSFETs with high-k dielectrics: Electrical behavior, modeling and process impact under Bias Temperature stress in high-k metal gated MOSFETs

dielectrics

von: Marc Aoulaiche · Guido Groeseneken · Herman Maes

Taschenbuch

Details (Deutschland)

ISBN: 978-3-8383-6404-9

ISBN-10: 3-8383-6404-X

LAP LAMBERT Academic Publishing · 2010