Shape and Functional Elements of the Bulk Silicon Microtechnique: A Manual of Wet-Etched Silicon Structures

Functional

von Joachim Frühauf

Taschenbuch

ISBN: 978-3-642-06048-9

ISBN-10: 3-642-06048-X

Springer · 2010

S. auch:
2004Gebundene AusgabeShape and Functional Elements of the Bulk Silicon Microtechnique: A Manual of Wet-Etched Silicon Structures